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Chinese Chinese Products Equipment Series Equipment Series Unpatterned Wafer Defect Inspection Equipment Series Patterned Wafer Defect Inspection Equipment Series Metrology Equipment Series Overlay Metrology Equipment Series 3D Surface Profiling Metrology Equipment Series Dielectric Film Metrology Equipment Series Software series Software Yield Management System DMS/YMS Semiconductor Auto Defect Classification System Skyverse Company Introduction Development History Corporate Culture Certificates of Honor News News Recruitment Social Recruitment Campus Recruitment Contact Investor Relations Patterned Wafer Defect Inspection Equipment Series SWEETGUM Home > Products > Equipment Series Product Introduction This series of equipment is mainly used for the inspection of 2D and 3D pattern defects at the sub-micron level or higher, enabling full-type defect detection on the patterned circuit. Equipped with a versatile bright/dark illumination system and zoom lenses, it can achieve different detection accuracy and high-speed autofocus. Its application extends to highly warped wafers with large surface variations in the front-end of the line and advanced packaging. Product Features 1、Provides integrated front-side, back-side and edge inspection, at sub-micron level accuracy. 2、Flexible modular configuration optimizes utilization of both expenditure and space. 3、Supports simultaneous online high-speed data acquisition of 3 modules. 4、Combined with deep learning algorithms, to achieve highly efficient and accurate ADC (Automatic Defect Classification) . 5、Provides multi-dimensional evaluation and display of measurement result, to quickly focus on process problems. Previous Product Unpatterned Wafer Defect Inspection Equipment Series SPRUCE Next Product Null Products Equipment Series Software series Skyverse Company Introduction Development History Corporate Culture Certificates of Honor News News Recruitment Social Recruitment Campus Recruitment Contact Investor Relations All rights reserved. Infringement will be investigated. 粤ICP备16055877号 WeChat QR Code -->