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Chinese Chinese Products Equipment Series Equipment Series Unpatterned Wafer Defect Inspection Equipment Series Patterned Wafer Defect Inspection Equipment Series Metrology Equipment Series Overlay Metrology Equipment Series 3D Surface Profiling Metrology Equipment Series Dielectric Film Metrology Equipment Series Software series Software Yield Management System DMS/YMS Semiconductor Auto Defect Classification System Skyverse Company Introduction Development History Corporate Culture Certificates of Honor News News Recruitment Social Recruitment Campus Recruitment Contact Investor Relations Unpatterned Wafer Defect Inspection Equipment Series SPRUCE Home > Products > Equipment Series Product Introduction This series of automated equipment is designed to inspect unpatterned wafer, equipped with advanced features for defect counting, spatial distribution analysis, and defect classification. It supports the inspection of different surface types including Bare, Oxide, Nitride, Metal, and more. The equipment employs laser from multiple angles to illuminate the wafer surface. Through the multi-dimensional movement of the sample stage, it achieves a swift and comprehensive scan of the entire sample surface, enabling the precise identification of the defect types and sizes. Product Features 1、Subjects to SECS/GEM SEMI standards, and is perfectly compatible with factory automation systems. 2、Provides extraordinary reliability. 3、Supports inspection of wafers at multiple design nodes. 4、Covers the demand of IC factories, wafer factories, and semiconductor equipment factories. 5、Applies to wafers of 2-12 inches, III-V compound semiconductors inclusive. Previous Product Null Next Product Patterned Wafer Defect Inspection Equipment Series SWEETGUM Products Equipment Series Software series Skyverse Company Introduction Development History Corporate Culture Certificates of Honor News News Recruitment Social Recruitment Campus Recruitment Contact Investor Relations All rights reserved. Infringement will be investigated. 粤ICP备16055877号 WeChat QR Code -->